• Subtractive & Mold Applications
    • Deep etching of silicon, such as Bosch Process, glass and polymers
    • Embossing mold for silicone imprints
  • Additive Applications
    • High aspect ratio plating for the fabrication of bumps for flip-chip packaging, multi-chip modules, MEMS, sensors, thin-film magnetic heads

Copper coil plated with NR26-12000P mask after resist removal.
Metal (Cu) Thickness = 25µm
Photoresist = Futurrex NR26-12000P

  • Applications
    • Replacement for positive resists in RIE process and general etch applications

Futurrex NR5-8000, 4.5:1 AR
Example of resist resolution
Film thickness: 54µm
Mask dimension: 12µm line/space
Exposure dose: 1100 mJ/cm2.
Focus offset: -15µm.
Exposure tool: Ultratech Stepper Saturn
Model, i-line

  • Applications
    • Facilitation of single-layer lift-off process to pattern metals and dielectrics without RIE
    • Permanent components of devices (i.e. spacers, etc.)

Futurrex NR1-3000PY
Liftoff profile for Negative Resist
Photoresist Thickness = 3µm.

Welcome to Futurrex - Productivity Tools

Futurrex, Inc. is a global manufacturer of high-purity thin films and novel processing solutions for the global microelectronics, photonics and other high growth technology markets. Our novel chemistries are sold in over 60 countries and enable next generation devices as well as revolutionize existing device fabrication. Our products feature unique physical characteristics allowing customers to expand process windows, increase process temperatures, throughput, thicknesses and yields, while tightening aggressive aspect ratios and allowing the development of devices never before manufactured due to physical limitations.

Since the mid 1980s, Futurrex has been a proven partner for thousands of customers from Fortune 15 corporations to early-stage venture capital-backed device and systems startups. Our unique positive-tone and negative-tone photoresists, dielectric coatings, specialty adhesives and protective coatings have been critical, long-lasting components of disruptive products in the analog semiconductor, MEMS, photonic device, packaging, display, biochip, solar and printing markets.

Futurrex, Inc. is a privately held, management-owned company that prides itself on its superb customer support and service capabilities. We have the unique ability to customize individual customer solutions and it is our conservative philosophy from our ownership structure to our balance sheet that has always allowed us to strengthen and expand in uncertain times while others have contracted making us a stable, long-term, customer-focused partner everywhere in the world.