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   Planarizing Coatings
 



 

 
 
 

 

 

 

 
 


 

Planarizing Coatings for Sacrificial Etchback Applications:
Thickness Range: 0.7 - 12 micrometers
Performance:
  • Superior planarizing capability.
  • Outstanding etchback compatibility with underlying dielectric.
Applications:
  • Surface planarization for planarization etchback process.
  • Protective coating.
  • Binding layer on the active side of devices for backgrinding.
  • Protective coating in wafer dicing.

 

 

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Futurrex, Inc.,  12 Cork Hill Road, Franklin, NJ 07416, USA
Phone: 973-209-1563   |  Fax: 973-209-1567

 

Email: info@futurrex.com 
 

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