• Subtractive & Mold Applications
    • Deep etching of silicon, such as Bosch Process, glass and polymers
    • Embossing mold for silicone imprints
  • Additive Applications
    • High aspect ratio plating for the fabrication of bumps for flip-chip packaging, multi-chip modules, MEMS, sensors, thin-film magnetic heads

Copper coil plated with NR4-8000P mask after resist removal.
Metal (Cu) Thickness = 25µm
Photoresist = Futurrex NR4-8000P


  • Applications
    • Replacement for positive resists in RIE process and general etch applications

Futurrex NR5-8000, 4.5:1 AR
Example of resist resolution
Film thickness: 54µm
Mask dimension: 12µm line/space
Exposure dose: 1100 mJ/cm2.
Focus offset: -15µm.
Exposure tool: Ultratech Stepper Saturn
Model, i-line


  • Applications
    • Facilitation of single-layer lift-off process to pattern metals and dielectrics without RIE
    • Permanent components of devices (i.e. spacers, etc.)

Futurrex NR1-3000PY
Liftoff profile for Negative Resist
NR1-3000PY.
Photoresist Thickness = 3µm.


History

Futurrex, Inc. was founded in 1985 by materials scientists from leading device manufacturers and research laboratories. Having experienced performance limitations of commercially available chemistries in the mid 1980s, the company’s core focus became providing high-performance specialty coatings for the semiconductor fabrication industries. Its mission was to enhance productivity by enabling new technologies, increasing throughput and yield.


Early in its life as Futurrex focused on creating complete solutions for individual customers in the analog semiconductor markets, the company developed novel chemistries for advanced performance positive- and negative-tone photoresists and related products that enabled the production of devices outside of prior performance capabilities, leading to scalable new applications and markets.


As end markets grew and device volumes increased over the next decades, Futurrex enhanced its capabilities and expanded is product lines allowing customers à la carte plug-and-play solutions or complete one-stop shopping for their photolithographic needs. Our chemical technologies have subsequently enabled processing windows to expand and enabled device engineers to cost-effectively create unique solutions that could ramp to mass-scale production.


Today Futurrex, Inc. continues to be privately owned and operated by its founding members while continuing to invest in its research and capabilities in order to scale and grow with its high-growth customers.

We supply specialty chemicals to diverse industry players globally and with our differentiated product suites and unmatched service capabilities, customers can enhance capabilities or earn quick return-on-investment by streamlining production capabilities with a turnkey Futurrex platform. To this day, Futurrex continues to be the only large-scale manufacturer of leading edge specialty chemicals that can also provide its customers with quickly created, custom-specific solutions in any of product category, allowing the customer to continue to differentiate capabilities helping form a long-standing competitive advantage.